TiN coating formed by large current ion implantation machine.
نویسندگان
چکیده
منابع مشابه
Low-loss planar optical waveguides in strontium barium niobate crystals formed by ion-beam implantation.
Planar optical waveguides have been formed in strontium barium niobate single crystals by either proton or heliumion implantation. The profiles of the ordinary and the extraordinary refractive indices are deduced from dark-line mode spectroscopy. Optical barriers with depths to Deltan(e) = 2.6% for protons and Deltan(e) = 5.5% for helium are obtained. By proton implantation we find a very low i...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1986
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.29.9_428